A Method for Enhancing the Position Accuracy of Semiconductor Wafer Handling Robots via Kinematic and Multi-condition Prediction Models

Huijun Yue; Yongshuo Li; Ruiji Wang; Haibo Lv; Guiping Xie; Yaoting Wu

doi:10.1007/s13369-026-11077-5

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Cite this Article (APA)

Huijun, Y., Yongshuo, L., Ruiji, W., Haibo, L., Guiping, X., Yaoting, W. (2026). A Method for Enhancing the Position Accuracy of Semiconductor Wafer Handling Robots via Kinematic and Multi-condition Prediction Models. Arabian Journal for Science and Engineering. https://doi.org/10.1007/s13369-026-11077-5